Chemical mechanical polishing in the dry lubrication regime: Application to conductive polysilicon
| Autor: | Pirayesh, H., Cadien, K. |
|---|---|
| Zdroj: | In Journal of Materials Processing Tech. June 2015 220:257-263 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Pirayesh, H., Cadien, K. |
|---|---|
| Zdroj: | In Journal of Materials Processing Tech. June 2015 220:257-263 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect