Parametric studies on pulsed near ultraviolet frequency tripled Nd:YAG laser micromachining of sapphire and silicon
| Autor: | Chen, Tai-Chang *, Darling, Robert B. |
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| Zdroj: | In Journal of Materials Processing Tech. 2005 169(2):214-218 |
| Databáze: | ScienceDirect |
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