SR-stimulated etching and OMVPE growth for semiconductor nanostructure fabrication
| Autor: | Nonogaki, Y *, Hatate, H, Oga, R, Yamamoto, S, Fujiwara, Y, Takeda, Y, Noda, H, Urisu, T |
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| Zdroj: | In Materials Science & Engineering B 2000 74(1):7-11 |
| Databáze: | ScienceDirect |
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