Characterisation of epitaxial layers on silicon by spectroscopic ellipsometry
| Autor: | Dittmar, Georg *, Gruska, Bernd |
|---|---|
| Zdroj: | In Materials Science & Engineering B 2000 73(1):255-259 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Dittmar, Georg *, Gruska, Bernd |
|---|---|
| Zdroj: | In Materials Science & Engineering B 2000 73(1):255-259 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
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