High temperature piezoresistive β-SiC-on-SOI pressure sensor with on chip SiC thermistor
| Autor: | Ziermann, R *, von Berg, J, Obermeier, E, Wischmeyer, F, Niemann, E, Möller, H, Eickhoff, M, Krötz, G |
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| Zdroj: | In Materials Science & Engineering B 1999 61:576-578 |
| Databáze: | ScienceDirect |
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