The evolution of cavities in Si at the 3C-SiC/Si interface during 3C-SiC deposition by LPCVD
| Autor: | Papaioannou, V. *, Möller, H., Rapp, M., Vogelmeier, L., Eickhoff, M., Krötz, G., Stoemenos, J. |
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| Zdroj: | In Materials Science & Engineering B 1999 61:539-543 |
| Databáze: | ScienceDirect |
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