Analysis on defect generation during the SiC bulk growth process
Autor: | Hofmann, D. *, Schmitt, E., Bickermann, M., Kölbl, M., Wellmann, P.J., Winnacker, A. |
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Zdroj: | In Materials Science & Engineering B 1999 61:48-53 |
Databáze: | ScienceDirect |
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