Atomic force microscopy investigations of rapid thermal carbonized silicon
| Autor: | Romanus, Henry, Cimalla, Volker, Kromka, Alexander, Scheiner, Jörg, Spieβ, Lothar, Pezoldt, Jörg |
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| Zdroj: | In Materials Science & Engineering B 1997 47(3):274-278 |
| Databáze: | ScienceDirect |
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