Study on properties of diamond-like carbon films deposited by RF ICP PECVD method for micro- and optoelectronic applications
| Autor: | Kijaszek, Wojciech, Wiatrowski, Artur, Mazur, Michał, Wojcieszak, Damian, Paszkiewicz, Regina, Kováč, Jaroslav, Jr. |
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| Zdroj: | In Materials Science & Engineering B October 2023 296 |
| Databáze: | ScienceDirect |
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