In-situ growth mechanism and structural evolution of silicon quantum dots embedded in Si-rich silicon carbide matrix prepared by RF-PECVD
| Autor: | Dridi Rezgui, B., Najjar, M., Ben Messaoud, K., Boujmil, M.F., Khirouni, K. |
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| Zdroj: | In Materials Science & Engineering B July 2023 293 |
| Databáze: | ScienceDirect |
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