Photoelectric, optical and microstructural characterization of thin palladium silicide (Pd2Si) layers fabricated by magnetron sputtering from a stoichiometric target
| Autor: | Piskorski, K., Wzorek, M., Ekielski, M., Dobrzański, L., Gaca, J., Malinowska, A., Michałowski, P., Borysiewicz, M.A. |
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| Zdroj: | In Materials Science & Engineering B September 2022 283 |
| Databáze: | ScienceDirect |
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