High-quality AlN nucleation layer on SiC substrate grown by MOVPE: Growth, structural and optical characteristics

Autor: Narang, Kapil, Pandey, Akhilesh, Khan, Ruby, Singh, Vikash K., Bag, Rajesh K., Padmavati, M.V.G., Tyagi, Renu, Singh, Rajendra
Zdroj: In Materials Science & Engineering B April 2022 278
Databáze: ScienceDirect