Synergist effect of potassium periodate and potassium persulfate on improving removal rate of Ruthenium during chemical mechanical polishing
| Autor: | Wang, Chao, Zhou, Jianwei, Luo, Chong, Wang, Chenwei, Zhang, Xue |
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| Zdroj: | In Materials Science & Engineering B December 2020 262 |
| Databáze: | ScienceDirect |
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