Impact of nitrogen plasma passivation on the Al/n-Ge contact
| Autor: | Lai, Shumei, Mao, Danfeng, Ruan, Yujiao, Xu, Yihong, Huang, Zhiwei, Huang, Wei, Chen, Songyan, Li, Cheng, Wang, Jianyuan, Tang, Dingliang |
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| Zdroj: | In Materials Science & Engineering B September 2016 211:178-184 |
| Databáze: | ScienceDirect |
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