Zirconia and hafnia films from single source molecular precursor compounds: Synthesis, characterization and insulating properties of potential high k-dielectrics
| Autor: | Schneider, Jörg J., Hoffmann, Rudolf C., Issanin, Alexander, Dilfer, Stefan |
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| Zdroj: | In Materials Science & Engineering B 2011 176(13):965-971 |
| Databáze: | ScienceDirect |
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