Plastic deformation in 200 mm silicon wafers arising from mechanical loads in vertical-type and horizontal-type furnaces
| Autor: | Fischer, A., Kissinger, G., Ritter, G., Akhmetov, V., Kittler, M. |
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| Zdroj: | In Materials Science & Engineering B 2009 159:103-106 |
| Databáze: | ScienceDirect |
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