He implantation induced nanovoids in crystalline Si
Autor: | Kilpeläinen, S., Kuitunen, K., Slotte, J., Tuomisto, F., Bruno, E., Mirabella, S., Priolo, F. |
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Zdroj: | In Materials Science & Engineering B 2009 159:164-167 |
Databáze: | ScienceDirect |
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