Compensation of decreased ion energy by increased hydrogen dilution in plasma deposition of thin film silicon solar cells at low substrate temperatures
| Autor: | Verkerk, A.D., de Jong, M.M., Rath, J.K., Brinza, M., Schropp, R.E.I., Goedheer, W.J., Krzhizhanovskaya, V.V., Gorbachev, Y.E., Orlov, K.E., Khilkevitch, E.M., Smirnov, A.S. |
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| Zdroj: | In Materials Science & Engineering B 2009 159:53-56 |
| Databáze: | ScienceDirect |
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