Quantitative study of the Si/SiO 2 phase separation in substoichiometric silicon oxide films
| Autor: | Nicotra, G., Spinella, C., La Magna, A., Bongiorno, C., Rimini, E. |
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| Zdroj: | In Materials Science & Engineering B 2009 159:80-82 |
| Databáze: | ScienceDirect |
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