Experimental investigations of boron diffusion mechanisms in crystalline and amorphous silicon
| Autor: | De Salvador, D., Napolitani, E., Mirabella, S., Bruno, E., Impellizzeri, G., Bisognin, G., Pecora, E.F., Priolo, F., Carnera, A. |
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| Zdroj: | In Materials Science & Engineering B 2008 154:240-246 |
| Databáze: | ScienceDirect |
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