Structural and optical properties of high density Si-ncs synthesized in SiN x:H by remote PECVD and annealing
| Autor: | Carrada, M., Zerga, A., Amann, M., Grob, J.J., Stoquert, J.P., Slaoui, A., Bonafos, C., Schamm, S. |
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| Zdroj: | In Materials Science & Engineering B 2008 147(2):218-221 |
| Databáze: | ScienceDirect |
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