PE-CVD fabrication of germanium nanoclusters for memory applications
| Autor: | Dürkop, T., Bugiel, E., Costina, I., Ott, A., Peibst, R., Hofmann, K.R. |
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| Zdroj: | In Materials Science & Engineering B 2008 147(2):213-217 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect