Strained Si engineering for nanoscale MOSFETs
| Autor: | Park, Jea-Gun, Lee, Gon-Sub, Kim, Tae-Hyun, Hong, Seuck-Hoon, Kim, Seong-Je, Song, Jin-Hwan, Shim, Tae-Hun |
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| Zdroj: | In Materials Science & Engineering B 2006 134(2):142-153 |
| Databáze: | ScienceDirect |
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