Advanced activation of ultra-shallow junctions using flash-assisted RTP
| Autor: | Lerch, W., Paul, S., Niess, J., McCoy, S., Selinger, T., Gelpey, J., Cristiano, F., Severac, F., Gavelle, M., Boninelli, S., Pichler, P., Bolze, D. |
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| Zdroj: | In Materials Science & Engineering B 2005 124:24-31 |
| Databáze: | ScienceDirect |
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