Substrate influence on the outdiffusion of antimony dopant in monocrystalline silicon
| Autor: | Labbani, R., Halimi, R. |
|---|---|
| Zdroj: | In Materials Science & Engineering B 2005 124:280-282 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Labbani, R., Halimi, R. |
|---|---|
| Zdroj: | In Materials Science & Engineering B 2005 124:280-282 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect