Novel approaches to improve laser annealed SOI-MOSFETs
| Autor: | Herrmann, T., Feudel, Th., Horstmann, M., Hoentschel, J., Herrmann, L., Herden, M., Klix, W., Stenzel, R. |
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| Zdroj: | In Materials Science & Engineering B 2005 124:223-227 |
| Databáze: | ScienceDirect |
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