Electrical activation of B and As implants in Silicon On Insulator (SOI) wafers

Autor:	Ottaviano, L. *, Italia, M., Mannino, G., Privitera, V., Herden, M., Feudel, T.
Zdroj:	In Materials Science & Engineering B 2004 114:260-263
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect