Metal layer mask patterning by force microscopy lithography
| Autor: | Filho, H.D. Fonseca, Maurício, M.H.P., Ponciano, C.R., Prioli, R. |
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| Zdroj: | In Materials Science & Engineering B 2004 112(2):194-199 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Filho, H.D. Fonseca, Maurício, M.H.P., Ponciano, C.R., Prioli, R. |
|---|---|
| Zdroj: | In Materials Science & Engineering B 2004 112(2):194-199 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect