Structural characterization of epitaxial Y2O3 on Si (0 0 1) and of the Y2O3/Si interface
| Autor: | Spiga, S, Wiemer, C, Tallarida, G, Fanciulli, M, Malvestuto, M, Boscherini, F, D’Acapito, F, Dimoulas, A, Vellianitis, G, Mavrou, G |
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| Zdroj: | In Materials Science & Engineering B 15 June 2004 109(1-3):47-51 |
| Databáze: | ScienceDirect |
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