Nanocomposite Ti–Si–N films deposited by reactive unbalanced magnetron sputtering at room temperature
| Autor: | Jiang, Ning, Shen, Y.G, Mai, Y.-W, Chan, Tai, Tung, Simon C |
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| Zdroj: | In Materials Science & Engineering B 2004 106(2):163-171 |
| Databáze: | ScienceDirect |
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