Systematic positron study of hydrophilicity of the internal pore surface in ordered low- k silica thin films
Autor: | Galindo, R.Escobar *, van Veen, A, Schut, H, Eijt, S.W.H, Falub, C.V, Balkenende, A.R, de Theije, F.K |
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Zdroj: | In Materials Science & Engineering B 2003 102(1):403-408 |
Databáze: | ScienceDirect |
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