Local composition analysis of SiC microstructures formed by ion projection in silicon using energy filtered TEM in combination with FIB specimen preparation
| Autor: | Lindner, J.K.N. *, Kubsky, S., Schertel, A. |
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| Zdroj: | In Materials Science & Engineering B 2003 102(1):70-74 |
| Databáze: | ScienceDirect |
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