Characterization of defects and whole wafer uniformity of annealed undoped semi-insulating InP wafers
| Autor: | Zhao, Youwen, Sun, Niefeng *, Dong, Hongwei, Jiao, Jinghua, Zhao, Jianqun, Sun, Tongnian, Lin, Lanying |
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| Zdroj: | In Materials Science & Engineering B 2002 91:521-524 |
| Databáze: | ScienceDirect |
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