Self-organized technology of anisotropic etching of semiconductors for optoelectronics application
| Autor: | Dmitruk, N.L *, Borkovskaya, O.Yu, Mayeva, O.I, Kolbasov, G.Ya, Mamontova, I.B |
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| Zdroj: | In Materials Science & Engineering B 2002 88(2):277-281 |
| Databáze: | ScienceDirect |
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