Structural and electrical properties of MOCVD-cobalt silicide on p-Si 0.83Ge 0.17/Si(001)
| Autor: | Shin, D.O., Ahn, Y.S., Ban, S.H., Lee, N.-E. *, Ahn, B.T., Kim, S.H., Shim, K.-H., Kang, J.-Y. |
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| Zdroj: | In Materials Science & Engineering B 2002 89(1):279-283 |
| Databáze: | ScienceDirect |
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