RBS-channeling studies on damage production by MeV ion implantation in Si(111) wafers
| Autor: | Cheang-Wong, J.C *, Crespo-Sosa, A, Oliver, A |
|---|---|
| Zdroj: | In Materials Science & Engineering B 2001 84(3):205-210 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Cheang-Wong, J.C *, Crespo-Sosa, A, Oliver, A |
|---|---|
| Zdroj: | In Materials Science & Engineering B 2001 84(3):205-210 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect