Patterning of GaN by ion implantation-dependent etching
| Autor: | Schiestel, S *, Molnar, B, Carosella, C.A, Knies, D, Stroud, R.M, Edinger, K |
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| Zdroj: | In Materials Science & Engineering B 2001 82(1):111-113 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Schiestel, S *, Molnar, B, Carosella, C.A, Knies, D, Stroud, R.M, Edinger, K |
|---|---|
| Zdroj: | In Materials Science & Engineering B 2001 82(1):111-113 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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