Development of a vertical gradient freeze process for low EPD GaAs substrates
| Autor: | Bünger, Th. *, Behr, D., Eichler, St., Flade, T., Fliegel, W., Jurisch, M., Kleinwechter, A., Kretzer, U., Steinegger, Th., Weinert, B. |
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| Zdroj: | In Materials Science & Engineering B 2001 80(1):5-9 |
| Databáze: | ScienceDirect |
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