Surface reconstruction of silicon and polysilicon by Nd:YAG laser etching: SEM, Raman and PL studies
| Autor: | Rasheed, B.G., Mavi, H.S. *, Shukla, A.K., Abbi, S.C., Jain, K.P. |
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| Zdroj: | In Materials Science & Engineering B 2001 79(1):71-77 |
| Databáze: | ScienceDirect |
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