Properties of titanium thin films deposited by dc magnetron sputtering

Autor: Jeyachandran, Y.L., Karunagaran, B., Narayandass, Sa.K., Mangalaraj, D., Jenkins, T.E., Martin, P.J.
Zdroj: In Materials Science & Engineering A 2006 431(1):277-284
Databáze: ScienceDirect