Study on application of magnetic levitation utilizing HTS bulks to spin processors for photo mask production

Autor: Fukui, S., Sato, R., Ogawa, J., Oka, T., Yamaguchi, M., Sato, T., Miyazaki, S., Sasahara, T., Tamaki, T., Nishiwaki, S., Yuki, Y.
Zdroj: In Physica C: Superconductivity and its applications 1 October 2007 463-465:1289-1292
Databáze: ScienceDirect
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