Optical emission spectroscopy and Langmuir probe characterisation of the sputtering plasma and its influence upon YBCO thin film properties

Autor: Tsaneva, V.N, Donchev, T.I, Popov, Tsv.K, Dias, F.M, Barber, Z.H, Tarte, E.J, Blamire, M.G, Hogg, M, Kahlmann, F, Evetts, J.E
Zdroj: In Physica C: Superconductivity and its applications 2002 372 Part 2:1087-1090
Databáze: ScienceDirect