Relaxation of mechanical stresses in bending of silicon wafers
| Autor: | Emtsev, V.V., Toporov, V.V., Oganesyan, G.A., Lebedev, A.A., Poloskin, D.S. |
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| Zdroj: | In Physica B: Condensed Matter 1 July 2024 684 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Emtsev, V.V., Toporov, V.V., Oganesyan, G.A., Lebedev, A.A., Poloskin, D.S. |
|---|---|
| Zdroj: | In Physica B: Condensed Matter 1 July 2024 684 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect