Improving structural and electrical properties of p-type Al–N-doped SnO2 films with low Al content by tuning N2 concentration in sputtering gas mixture
| Autor: | Dan, Ho Kim, Dang, Huu Phuc, Quach, Uy Lap, Le, Tran |
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| Zdroj: | In Physica B: Condensed Matter 1 February 2023 650 |
| Databáze: | ScienceDirect |
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