Effect of GaAs(100) substrate misorientation on structural, electronic, and optical properties of AlN nano-sized films obtained by reactive plasma-ion deposition
| Autor: | Seredin, P.V., Terekhov, V.A., Barkov, K.A., Arsentyev, I.N., Bondarev, A.D. |
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| Zdroj: | In Physica B: Physics of Condensed Matter 15 June 2019 563:62-71 |
| Databáze: | ScienceDirect |
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