300 mm Czochralski silicon wafers optimized with respect to voids with laterally homogeneous oxygen precipitation
| Autor: | Kissinger, G., Raming, G., Wahlich, R., Müller, T. |
|---|---|
| Zdroj: | In Physica B: Physics of Condensed Matter 1 August 2012 407(15):2993-2997 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect