Point defects generated by oxidation of silicon crystal surface
| Autor: | Suezawa, M. a, ⁎, Yamamoto, Y. b, Suemitsu, M. b, Yonenaga, I. a |
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| Zdroj: | In Physica B: Physics of Condensed Matter 15 December 2009 404(23-24):5156-5158 |
| Databáze: | ScienceDirect |
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