Analysis of photoluminescence spectra for detection of stress-induced defects in silicon substrates after the polycrystalline diamond film deposition
| Autor: | Bagaev, Victor S., Aminev, Denis F., Galkina, Tatiana I., Klokov, Andrey Yu., Krivobok, Vladimir S., Ralchenko, Victor G. |
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| Zdroj: | In Physica B: Physics of Condensed Matter 15 December 2009 404(23-24):4616-4618 |
| Databáze: | ScienceDirect |
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