Formation of vacancy and oxygen containing complexes in Cz-Si by rapid thermal annealing
| Autor: | Akhmetov, V., Kissinger, G., von Ammon, W. |
|---|---|
| Zdroj: | In Physica B: Physics of Condensed Matter 15 December 2009 404(23-24):4572-4575 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect