Defect studies for the development of nano-scale silicon diffusion simulators
| Autor: | Uematsu, Masashi, Shimizu, Yasuo, Itoh, K.M. |
|---|---|
| Zdroj: | In Physica B: Physics of Condensed Matter 2007 401:511-518 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Uematsu, Masashi, Shimizu, Yasuo, Itoh, K.M. |
|---|---|
| Zdroj: | In Physica B: Physics of Condensed Matter 2007 401:511-518 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect